P.L.Stephan Thamban

Senior Lecturer II - Mechanical Engineering
 
972-883-4687
ECN2518
Tags: Mechanical Engineering

Professional Preparation

PhD
The University of Texas at Dallas - 2005
MS
The University of Texas at Dallas - 2002

Research Areas

Major Honors and Awards
  • Recognition for inventive contribution, UTD, (2011)

  • Invitation to moderate at AVS's international symposium and exhibition, Nashville, (2011)

Publications

“Silicon Etch using SF6 /C4F8/Ar Gas Mixtures”, R.L. Bates, P.L.S. Thamban, M. J. Goeckner, and L. J. Overzet, J. Vac. Sci. Technol. A 32, 041302  2014 - Publication
“Understanding the Synthesis of Ethylene Glycol Pulsed Plasmas for Development of Ultra Thin Biocompatible Interfaces”, G.Padron-Wells, I.-C. Raygoza, P.L.S. Thamban, C. T. Nelson, C.-W. Chung, L. J. Overzet, and M. J. Goeckner, Plasma processes and polymers 10, 119  2013 - Publication
“Electron beam excitation method to study gas phase during etch processes”, P.L.S. Thamban, G.Padron-Wells, S. Yun, J. Hosch, and M. J. Goeckner, J. Vac. Sci. & Technol. B 30, 041201 2012 - Publication
“Comparison endpoint study of process plasma and secondary electron beam exciter optical emission spectroscopy”, P.L.S. Thamban, S. Yun, G.Padron-Wells, J. Hosch, and M. J. Goeckner, J. Vac. Sci. Technol. A 30, 061303  2012 - Publication
“Controllable optical emission spectroscopy diagnostic system for analysis of process chemistries”, P.L.S. Thamban, J. Hosch, and M. J. Goeckner, Rev. Sci. Instrum. 81, 013502 2010 - Publication