PhD
The University of Texas at Dallas - 2005
Professional Preparation
MS
The University of Texas at Dallas - 2002
The University of Texas at Dallas - 2002
Research Areas
Major Honors and Awards
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Recognition for inventive contribution, UTD, (2011)
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Invitation to moderate at AVS's international symposium and exhibition, Nashville, (2011)
Publications
“Silicon Etch using SF6 /C4F8/Ar Gas Mixtures”, R.L. Bates, P.L.S. Thamban, M. J. Goeckner, and L. J. Overzet, J. Vac. Sci. Technol. A 32, 041302 2014 - Publication
“Understanding the Synthesis of Ethylene Glycol Pulsed Plasmas for Development of Ultra Thin Biocompatible Interfaces”, G.Padron-Wells, I.-C. Raygoza, P.L.S. Thamban, C. T. Nelson, C.-W. Chung, L. J. Overzet, and M. J. Goeckner, Plasma processes and polymers 10, 119 2013 - Publication
“Comparison endpoint study of process plasma and secondary electron beam exciter optical emission spectroscopy”, P.L.S. Thamban, S. Yun, G.Padron-Wells, J. Hosch, and M. J. Goeckner, J. Vac. Sci. Technol. A 30, 061303 2012 - Publication
“Electron beam excitation method to study gas phase during etch processes”, P.L.S. Thamban, G.Padron-Wells, S. Yun, J. Hosch, and M. J. Goeckner, J. Vac. Sci. & Technol. B 30, 041201 2012 - Publication
“Controllable optical emission spectroscopy diagnostic system for analysis of process chemistries”, P.L.S. Thamban, J. Hosch, and M. J. Goeckner, Rev. Sci. Instrum. 81, 013502 2010 - Publication