Publications
Plasma-surface interactions Preview M. Goeckner, C. Nelson, S. Sant, A. Jindal, E. Joseph, B. Zhou, G. Padron-Wells, B. Jarvis, R. Pierce, and L. Overzet. J. Phys: Conference Series, 133, 012010 (2008) (10 pp.) 2008 - Publication
The enhanced growth of multi-walled carbon nanotubes using an atmospheric pressure plasma jet. K. H. Lee, H.-S. Jang, G.-Y. Eom, B.-J. Lee, D. Burk, L. Overzet, G. S. Lee. Materials Letters 62, 3849-51 (2008). 2008 - Publication
The Role of Chamber Dimension in Fluorocarbon Based Etching of Silicon Dioxide and its Effects on Gas and Surface-Phase Chemistry E.A. Joseph, S.P. Sant, L.J. Overzet and M.J. Goeckner, J. Vac. Sci. Technol. A 26, 545-554 (2008). 2008 - Publication
Two cryogenic processes involving SF6, O2, and SiF4 for silicon deep etching. T. Tillocher, R. Dussart, L. Overzet, X. Mellhaoui, P. Lefaucheux, M. Boufnichel and P. Ranson. J. Electrochem. Soc. 155, D187-D191 (2008). 2008 - Publication
Surface kinetics with low ion energy bombardment in fluorocarbon plasmas C.T. Nelson, S.P. Sant, L.J. Overzet, and M.J. Goeckner, Plasma Sources Science & Technology 16, 813-821 (2007). 2007 - Publication
Surface kinetics with low ion energy bombardment in fluorocarbon plasmas C.T. Nelson, S.P. Sant, L.J. Overzet, and M.J. Goeckner, Plasma Sources Science & Technology 16, 813-821 (2007). 2007 - Publication
Spectroscopic study of gas and surface phase chemistries of fluorocarbon plasma in an inductively coupled modified gaseous electronics conference (mGEC) reactor. Baosuo Zhou, E. A. Joseph, L. J. Overzet, and M. J. Goeckner, Journal of Vacuum Science and Technology A, 24, 114 (2006). 2006 - Publication
Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference (mGEC) reactor. B.S. Zhou, E. A. Joseph, S. P. Sant, L. J. Overzet, and M. J. Goeckner, Journal of Vacuum Science and Technology A 23, 1657-67 (2005). 2005 - Publication
Gas-phase and sample characterizations of multiwall carbon nanotube growth using an atmospheric pressure plasma. A. Chandrashekar, J.-S. Lee, G. Lee, M. Goeckner, L. Overzet, J. Vac, Sci. Technol. A 24, 1812-17 (2006). This article was also selected for the August 14, 2006 issue of Virtual Journal of Nanoscale Science & Technology. Access the Virtual Journal at http://www.vjnano.org. SiOxFy passivation layer in silicon cryoetching. X. Mellhaoui, R. Dussart,a T. Tillocher, P. Lefaucheux, and P. Ranson, M. Boufnichel and L. J. Overzet, J. Appl. Phys. 98, 104901(10 pages) (2005). 2005 - Publication
Chlorine Plasma and Polysilicon Etch Characterization in an Inductively Coupled Plasma Etch Reactor. M. Khater and L. Overzet. Plasma Sources Sci. Technol. 13, 466483 (2004). 2004 - Publication
Projects
Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites.
2007–2007 Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites. L. Overzet, M. Goeckner, D. Ogawa, I Saraf, R. Timmons and S. Sanchez. SPRING IV Conference, U. Houston, Houston TX Feb. 2007.
Carbon nanotube (CNT) growth using an atmospheric pressure plasma jet process and initial device test
2005–2005
In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma.
2005–2005 In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma. L. Overzet, M. Goeckner, E. Joseph, B. Zhou and S. Sant, Dry Process Symposium, Jeju Island Korea, Nov. 2005.
Filling of Carbon Nanotube Forests Grown by Atmospheric Pressure PECVD
2006–2006
Plasma Science Research at UTD: From Fluorocarbons to CNTs
2004–2004 Plasma Science Research at UTD: From Fluorocarbons to CNTs. L. Overzet, M. Goeckner and G.-S. Lee. University of Orleans - GREMI seminar. Orleans, France May 2004