Lawrence Overzet

Professor - Electrical Engineering
Professor - Electrical Engineering
overzet@utdallas.edu
972-883-2154
ECN4708
Faculty Homepage
Tags: Electrical Engineering Computer Engineering

Professional Preparation

Ph.D. - Electrical Engineering
University of Illinios - 1988
M.S. - Electrical Engineering
University of Illinios - 1986
B.S. - Electrical Engineering
University of Illinios - 1983

Research Areas

Research Interests
The primary focus of my research is on the plasmas used in semiconductor device manufacturing. The research is primarily experimental in nature although I have performed some plasma simulations and will be doing it more. In particular, my group is best known for our research into pulsed plasmas and ion-ion plasmas. Pulsed-plasmas have the plasma source turned on-and-off periodically, while ion-ion plasmas have only positive and negative ions in them and no electrons. Both have significant advantages over continuous electron-ion dominated plasmas. I and my students have developed several diagnostics for studying these plasmas and consequently have extensive experience in determining plasma kinetics.  These projects have been supported by the NSF, DoE, State of Texas, and several companies.   2009 projects include work for SRC (Deep Si Etch), Photronics (Mask etch) and DoE (Micro-Misted plasmas).

Publications

Plasma-surface interactions Preview M. Goeckner, C. Nelson, S. Sant, A. Jindal, E. Joseph, B. Zhou, G. Padron-Wells, B. Jarvis, R. Pierce, and L. Overzet. J. Phys: Conference Series, 133, 012010 (2008) (10 pp.) 2008 - Publication
The enhanced growth of multi-walled carbon nanotubes using an atmospheric pressure plasma jet. K. H. Lee, H.-S. Jang, G.-Y. Eom, B.-J. Lee, D. Burk, L. Overzet, G. S. Lee. Materials Letters 62, 3849-51 (2008). 2008 - Publication
The Role of Chamber Dimension in Fluorocarbon Based Etching of Silicon Dioxide and its Effects on Gas and Surface-Phase Chemistry E.A. Joseph, S.P. Sant, L.J. Overzet and M.J. Goeckner, J. Vac. Sci. Technol. A 26, 545-554 (2008). 2008 - Publication
Two cryogenic processes involving SF6, O2, and SiF4 for silicon deep etching.  T. Tillocher, R. Dussart, L. Overzet, X. Mellhaoui, P. Lefaucheux, M. Boufnichel and P. Ranson. J. Electrochem. Soc. 155, D187-D191 (2008). 2008 - Publication
Surface kinetics with low ion energy bombardment in fluorocarbon plasmas C.T. Nelson, S.P. Sant, L.J. Overzet, and M.J. Goeckner, Plasma Sources Science & Technology 16, 813-821 (2007). 2007 - Publication
Surface kinetics with low ion energy bombardment in fluorocarbon plasmas C.T. Nelson, S.P. Sant, L.J. Overzet, and M.J. Goeckner, Plasma Sources Science & Technology 16, 813-821 (2007). 2007 - Publication
Spectroscopic study of gas and surface phase chemistries of fluorocarbon plasma in an inductively coupled modified gaseous electronics conference (mGEC) reactor. Baosuo Zhou, E. A. Joseph, L. J. Overzet, and M. J. Goeckner, Journal of Vacuum Science and Technology A, 24, 114 (2006). 2006 - Publication
Effect of surface temperature on plasma-surface interactions in an inductively coupled modified gaseous electronics conference (mGEC) reactor. B.S. Zhou, E. A. Joseph, S. P. Sant, L. J. Overzet, and M. J. Goeckner, Journal of Vacuum Science and Technology A 23, 1657-67 (2005). 2005 - Publication
Gas-phase and sample characterizations of multiwall carbon nanotube growth using an atmospheric pressure plasma. A. Chandrashekar, J.-S. Lee, G. Lee, M. Goeckner, L. Overzet, J. Vac, Sci. Technol. A 24, 1812-17 (2006). This article was also selected for the August 14, 2006 issue of Virtual Journal of Nanoscale Science & Technology. Access the Virtual Journal at http://www.vjnano.org. SiOxFy passivation layer in silicon cryoetching. X. Mellhaoui, R. Dussart,a T. Tillocher, P. Lefaucheux, and P. Ranson, M. Boufnichel and L. J. Overzet, J. Appl. Phys. 98, 104901(10 pages) (2005). 2005 - Publication
Chlorine Plasma and Polysilicon Etch Characterization in an Inductively Coupled Plasma Etch Reactor. M. Khater and L. Overzet. Plasma Sources Sci. Technol. 13, 466483 (2004). 2004 - Publication

Appointments

Associate Professor
University of Texas at Dallas [1994–Present]
Erik Jonsson School of Engineering and Computer Science
Assistant Professor
University of Texas at Dallas [1988–1994]
Erik Jonsson School of Engineering and Computer Science

Projects

Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites.
2007–2007 Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites. L. Overzet, M. Goeckner, D. Ogawa, I Saraf, R. Timmons and S. Sanchez. SPRING IV Conference, U. Houston, Houston TX Feb. 2007.
Carbon nanotube (CNT) growth using an atmospheric pressure plasma jet process and initial device test
2005–2005
In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma.
2005–2005 In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma. L. Overzet, M. Goeckner, E. Joseph, B. Zhou and S. Sant, Dry Process Symposium, Jeju Island Korea, Nov. 2005.
Filling of Carbon Nanotube Forests Grown by Atmospheric Pressure PECVD
2006–2006
Plasma Science Research at UTD: From Fluorocarbons to CNTs
2004–2004 Plasma Science Research at UTD: From Fluorocarbons to CNTs. L. Overzet, M. Goeckner and G.-S. Lee. University of Orleans - GREMI seminar. Orleans, France May 2004

Additional Information

Honors and Awards
  1. Honorary Member in the Golden Key International Honour Society (10/07).
  2. Polykarp Kusch Lecturer for UTD 2005.
"Consulting, Patents, Etc."
  1. Consultant on Plasma Based Semiconductor Cleaning Technologies and Liaison to the Sandia National Laboratories CRADA Team, Sept.-Dec. 1999, Beta Squared Incorporated, Allen TX.
  2. Patents:
    1. High Density Plasma Source for Semiconductor Processing. # 6,028,285.
    2. Plasma Apparatus for Ion Energy Control. # 6,097,157.
    3. Transmission Line Based Inductively Coupled Plasma Source with Stable Impedance. # 6,459,066
    4. Particle Contamination Cleaning from Substrates Using Plasmas, Reactive Gases, and Mechanical Agitation. #6,676,800.
    5. Ion-Ion Plasma Processing with Bias Modulation Synchronized to Time-Modulated Discharges. #6,875,700

News Articles

Professor Takes Leadership Role in Electrical Engineering Department
Dr. Lawrence Overzet, a longtime professor in the Department of Electrical Engineering at UT Dallas, has been chosen to lead the department this fall.

In 1988, Overzet joined the Department of Electrical Engineering, which is routinely in the top 15 U.S. programs for the number of degrees awarded annually and includes members of the Texas Analog Center of Excellence, the largest university-based analog center in the world. The department, along with the Department of Computer Science, was a cornerstone in the creation of the Erik Jonsson School of Engineering and Computer Science in 1986.
Prof Proud of One Grad in Particular: His Daughter
For Katie Overzet, going to school with Dad hasn’t been too bad.

She is scheduled to graduate from UT Dallas’ School of Behavioral and Brain Sciences on Saturday with a degree in neuroscience. And while she doesn’t often run into her father, electrical engineering Professor Lawrence Overzet, Katie said it’s been great knowing he’s around campus.

“It’s nice to have him there, looking out for me,” she said.

Overzet certainly plans to be there for his daughter on graduation day and might even get a chance to participate in the ceremony.

Katie is the eldest of his four children and the first to attend UT Dallas. Two of her younger siblings have since opted for Texas A&M University because they chose majors not offered here.