Ph.D. - Electrical Engineering
University of Illinios - 1988
M.S. - Electrical Engineering
University of Illinios - 1986
B.S. - Electrical Engineering
University of Illinios - 1983
The primary focus of my research is on the plasmas used in semiconductor device manufacturing. The research is primarily experimental in nature although I have performed some plasma simulations and will be doing it more. In particular, my group is best known for our research into pulsed plasmas and ion-ion plasmas. Pulsed-plasmas have the plasma source turned on-and-off periodically, while ion-ion plasmas have only positive and negative ions in them and no electrons. Both have significant advantages over continuous electron-ion dominated plasmas. I and my students have developed several diagnostics for studying these plasmas and consequently have extensive experience in determining plasma kinetics. These projects have been supported by the NSF, DoE, State of Texas, and several companies. 2009 projects include work for SRC (Deep Si Etch), Photronics (Mask etch) and DoE (Micro-Misted plasmas).
Tuning of Fe catalysts for growth of spin-capable carbon nanotubes. J.-H. Kim, H.-S. Jang, K. H. Lee, L. J. Overzet, G. S. Lee, Carbon 48, 538-47 (2010). 2010 - Publication
Transient effects caused by pulsed gas and liquid injections into low pressure plasmas. D. Ogawa, C. Chung, M. Goeckner and L. Overzet, Plasma Sources Sci. Technol. 19 034013 (2010) (11 pp.) 2010 - Publication
Progress report: Direct injection of liquids into low-pressure plasmas. M. Goeckner, D. Ogawa, I. Saraf and L. Overzet, Journal of Physics: Conference Series 162, 012014 (2009) (9 pp.). 2009 - Publication
Chemistry in long residence time fluorocarbon plasmas. S. P. Sant, C. T. Nelson, L. J. Overzet, and M. J. Goeckner, J. Vac. Sci. Technol. A 27, 193-208 (2009). 2009 - Publication
"The Direct Injection of Liquid Droplets into Low Pressure Plasmas." D. Ogawa, I. Saraf, A. Sra, R. Timmons, M. Goeckner and L. Overzet, J. Vac. Sci. Technol. A 27, 342-351 (2009). Also selected for the March 16, 2009 issue of Virtual Journal of Nanoscale Science & Technology. Access the Virtual Journal at http://www.vjnano.org
2009 - Publication
Relationship between gas-phase chemistries and surface processes in fluorocarbon etch plasmas: A process rate model. S. P. Sant, C. T. Nelson, L. J. Overzet, and M. J. Goeckner, J. Vac. Sci. Technol. A 27, 631- 42 (2009). 2009 - Publication
Forming carbon nanotube composites by directly coating forests with inorganic materials using low pressure chemical vapor deposition. A. Chandrashekar, S. Ramachandran, G. Pollack, J.-S. Lee, G.S. Lee, L. Overzet. Thin Solid Films 517, 525-530 (2008). 2008 - Publication
Electronegative plasma structure. MJ Goeckner, C.T. Nelson and L.J. Overzet, IEEE Trans. Plasma Science 36, 996-7 (2008). 2008 - Publication
Durable diamond-like carbon templates for UV nanoimprint lithography. L. Tao, S. Ramachandran, C. Nelson, M. Lin, L. Overzet, M. Goeckner, G.S. Lee, C. Willson, W. Wu and W. Hu, Nanotechnology, 19, 105302 (2008) (7pp). 2008 - Publication
Effect of limiting the cathode surface on direct current microhollow cathode discharge in helium. T. Dufour, R. Dussart, P. Lefaucheux, P. Ranson, L. Overzet, M. Mandra, J.-B. Lee, M. Goeckner. Applied Physics Letters 93, 071508 (2008). (3pp). 2008 - Publication
University of Texas at Dallas [1994–Present]
Erik Jonsson School of Engineering and Computer Science
University of Texas at Dallas [1988–1994]
Erik Jonsson School of Engineering and Computer Science
Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites.
2007–2007 Direct injection of liquids into low pressure plasmas: Working towards the synthesis of nanostructured composites. L. Overzet, M. Goeckner, D. Ogawa, I Saraf, R. Timmons and S. Sanchez. SPRING IV Conference, U. Houston, Houston TX Feb. 2007.
Carbon nanotube (CNT) growth using an atmospheric pressure plasma jet process and initial device test
In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma.
2005–2005 In-situ study of plasma-wall interactions in inductively coupled fluorocarbon plasma. L. Overzet, M. Goeckner, E. Joseph, B. Zhou and S. Sant, Dry Process Symposium, Jeju Island Korea, Nov. 2005.
Filling of Carbon Nanotube Forests Grown by Atmospheric Pressure PECVD
Plasma Science Research at UTD: From Fluorocarbons to CNTs
2004–2004 Plasma Science Research at UTD: From Fluorocarbons to CNTs. L. Overzet, M. Goeckner and G.-S. Lee. University of Orleans - GREMI seminar. Orleans, France May 2004
Honors and Awards
- Honorary Member in the Golden Key International Honour Society (10/07).
- Polykarp Kusch Lecturer for UTD 2005.
"Consulting, Patents, Etc."
- Consultant on Plasma Based Semiconductor Cleaning Technologies and Liaison to the Sandia National Laboratories CRADA Team, Sept.-Dec. 1999, Beta Squared Incorporated, Allen TX.
- High Density Plasma Source for Semiconductor Processing. # 6,028,285.
- Plasma Apparatus for Ion Energy Control. # 6,097,157.
- Transmission Line Based Inductively Coupled Plasma Source with Stable Impedance. # 6,459,066
- Particle Contamination Cleaning from Substrates Using Plasmas, Reactive Gases, and Mechanical Agitation. #6,676,800.
- Ion-Ion Plasma Processing with Bias Modulation Synchronized to Time-Modulated Discharges. #6,875,700
Dr. Lawrence Overzet, a longtime professor in the Department of Electrical Engineering
at UT Dallas, has been chosen to lead the department this fall.
In 1988, Overzet joined the Department of Electrical Engineering, which is routinely in the top 15 U.S. programs for the number of degrees awarded annually and includes members of the Texas Analog Center of Excellence
, the largest university-based analog center in the world. The department, along with the Department of Computer Science
, was a cornerstone in the creation of the Erik Jonsson School of Engineering and Computer Science
For Katie Overzet, going to school with Dad hasn’t been too bad.
She is scheduled to graduate from UT Dallas’ School of Behavioral and Brain Sciences
on Saturday with a degree in neuroscience. And while she doesn’t often run into her father, electrical engineering
Professor Lawrence Overzet, Katie said it’s been great knowing he’s around campus.
“It’s nice to have him there, looking out for me,” she said.
Overzet certainly plans to be there for his daughter on graduation day and might even get a chance to participate in the ceremony.
Katie is the eldest of his four children and the first to attend UT Dallas. Two of her younger siblings have since opted for Texas A&M University because they chose majors not offered here.